Customized MEMS structures and solutions:
High aspect structures
3D-structures with high aspect ratio for microoptics or - fluidics.
A variety of metal electrodes with sizes down to 100 nm.
Several active elements made of SiN or SiO2.
Packaged probe with integrated thermal sensor.
Spray coating structure
Resist structure at the bottom of a v-groove (depth ~280 µm).
Cantilever with integrated piezoresistive stress gauge (doped silicon).
Grating suitable for the calibration of measurement tools (SEM, AFM).
Elec. circuit on Si-bridge
Deflection sensor on a silicon bridge.
Small EBD-grown spikes e.g. to measure biosignals.
Small and large metal membranes for nanopore filters.
Cantilevers made of silicon or nitride for any sensor application (e.g. func-tionalization).
Detection of the bending by using the magnetostrictive effect (NiFe or NiCo).
Probes made of different materials suitable for Atomic Force Microscopes.
Arrays of individual addressable microstructures.
Thin Silicon membranes with holes down to 70nm in diameter.